cleanroom Actuator

GLCH Series

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cleanroom Actuator

cleanroom Actuator

cleanroom Actuator

The highly sealed structure of GLCH series achieves the dust emission prevention and improvement of the suction efficiency to establish both a high cleanliness degree and high performance. Industries like semiconductor manufacturing typically requires a higher cleanliness level than medical device manufacturing due to the extremely dust-sensitive nature of delicate silicon wafers.

Many of today’s cleanroom actuators employ ball screws, while other designs use belt drives or rack-and-pinion arrangements. Actuators designed for cleanroom environments are typically connected to vacuum systems in order to remove any particles generated during motion.

In the vast majority of cleanroom applications involving actuators, positioning repeatability to 50 μm is acceptable.

Features

  • Sealing design can prevent dirt and foreign objects from penetrating inside.
  • Equipped with an air fitting device, which can keep the internal component clean.
  • Clean type can support cleanroom grade class 10(examined by SGS) widely applied in semi-conductor industry and food supply chain.
  • Effectively minimize the pollution of the actuator and working environment.

Applications

Semi-conductor manufacturing, Wafer piling, Wafer surface cleaning device, Food processing industry

GLCH5 series

GLCH5 series specification

Specification
Specification
Repeatability mm ± 0.005
Ball Screw Lead mm 2 6 12 20
Maximum Rotating Speed RPM 3600 3600 3600 3600
Maximum Linear Speed mm/s 120 300 720 1200
Maximum Payload Horizontal Kg 30 25 22 10
Vertical Kg 10 6 4 3
Rated Thrust N 854 285 142 85
Stroke pitch mm 50-1000mm/50 intervals (50 Increments)
Maximum acceleration(G) G 0.12 0.37 0.73 1.22
Ball Screw Basic Dynamic Load rating Ca N 2270 2243 1436 1384
Basic Static Load rating Coa N 4836 3959 2441 2435
Linear Guide Dynamic horizontal (100km) 6563
Static horizontal N 13587
Fixed Bearing Basic Dynamic Load rating N 5361
Static Load Rating Cr N 2880
AC Servo Moter Output W 100
Ball Screw ⌀ mm C7⌀10
Coupling mm 7X8
Home Sensor Outside T64N2(NPN+2m cable)

GLCH5D series

GLCH5D series specification

Specification
Specification
Repeatability mm ± 0.005
Ball Screw Lead mm 2 6 12 20
Maximum Rotating Speed RPM 3600 3600 3600 3600
Maximum Linear Speed mm/s 120 300 720 1200
Maximum Payload Horizontal Kg 30 25 22 10
Vertical Kg 10 6 4 3
Rated Thrust N 854 285 142 85
Stroke pitch mm 50-850mm/50 intervals (50 Increments)
Maximum acceleration G 0.12 0.37 0.73 1.22
Ball Screw Basic Dynamic Load rating Ca N 2270 2243 1436 1384
Basic Static Load rating Coa N 4836 3959 2441 2535
Linear Guide Dynamic horizontal 100km 6563
Static horizontal N 13587
Fixed Bearing Basic Dynamic Load rating N 5361
Static Load Rating Cr N 2880
AC Servo Moter Output W 100
Ball Screw ⌀ mm C7⌀10
Coupling mm 7X8
Home Sensor Outside T64N2(NPN+2m cable)

GLCH8-200W series

GLCH8-200W series specification

Specification
Specification
Repeatability mm ± 0.005
Ball Screw Lead mm 6 12 24
Maximum Rotating Speed RPM 3600 3600 3600
Maximum Linear Speed mm/s 360 720 1440
Maximum Payload Horizontal Kg 80 60 40
Vertical Kg 15 8 5
Rated Thrust N 569 284 142
Stroke pitch mm 50-800mm/50 intervals (50 Increments)
Maximum acceleration G 0.37 0.73 1.47
Ball Screw Basic Dynamic Load rating Ca N 7733 5855 3007
Basic Static Load rating Coa N 14200 10401 5414
Linear Guide Dynamic horizontal 100km 18601
Static horizontal N 34189
Fixed Bearing Basic Dynamic Load rating N 8447
Static Load Rating Cr N 5060
AC Servo Moter Output W 200
Ball Screw ⌀ mm C7⌀14
Coupling mm 10X14/11
Home Sensor Outside T64N2(NPN+2m cable)

GLCH8-400W series

GLCH8-400W series specification

Specification
Specification
Repeatability mm ± 0.005
Ball Screw Lead mm 6 12 24
Maximum Rotating Speed RPM 3600 3600 3600
Maximum Linear Speed mm/s 360 720 1440
Maximum Payload Horizontal Kg 105 85 40
Vertical Kg 30 20 10
Rated Thrust N 1156 578 289
Stroke pitch mm 50-1250mm/50 intervals (50 Increments)
Maximum acceleration G 0.37 0.73 1.47
Ball Screw Basic Dynamic Load rating Ca N 7733 5855 3007
Basic Static Load rating Coa N 14200 10401 5414
Linear Guide Dynamic horizontal 100km 18601
Static horizontal N 34189
Fixed Bearing Basic Dynamic Load rating N 8447
Static Load Rating Cr N 5060
AC Servo Moter Output W 400
Ball Screw ⌀ mm C7⌀14
Coupling mm 10X14
Home Sensor Outside T64N2(NPN+2m cable)

GLCH12 series

GLCH8-400W series specification

Specification
Specification
Repeatability mm ± 0.005
Ball Screw Lead mm 6 12 24
Maximum Rotating Speed RPM 3600 3600 3600
Maximum Linear Speed mm/s 360 720 1440
Maximum Payload Horizontal Kg 110 88 40
Vertical Kg 30 20 10
Rated Thrust N 1156 578 289
Stroke pitch mm 50-1250mm/50 intervals (50 Increments)
Maximum acceleration G 0.37 0.73 1.47
Ball Screw Basic Dynamic Load rating Ca N 7733 5855 3007
Basic Static Load rating Coa N 14200 10401 5414
Linear Guide Dynamic horizontal 100km 51128
Static horizontal N 84518
Fixed Bearing Basic Dynamic Load rating N 2600
Static Load Rating Cr N 4750
AC Servo Moter Output W 400
Ball Screw ⌀ mm C7⌀14
Coupling mm 10X14
Home Sensor Outside T64N2(NPN+2m cable)

GLCH8D-200W series

GLCH8D-200W series specification

Specification
Specification
Repeatability mm ± 0.005
Ball Screw Lead mm 6 12 24
Maximum Rotating Speed RPM 3600 3600 3600
Maximum Linear Speed mm/s 360 720 1440
Maximum Payload Horizontal Kg 80 60 40
Vertical Kg 15 8 5
Rated Thrust N 569 284 142
Stroke pitch mm 50-1050mm/50 intervals (50 Increments)
Maximum acceleration G 0.37 0.73 1.47
Ball Screw Basic Dynamic Load rating Ca N 7733 5855 3007
Basic Static Load rating Coa N 14200 10401 5414
Linear Guide Dynamic horizontal 100km 18601
Static horizontal N 34189
Fixed Bearing Basic Dynamic Load rating N 8447
Static Load Rating Cr N 5060
AC Servo Moter Output W 200
Ball Screw ⌀ mm C7⌀14
Coupling mm 10X14/11
Home Sensor Outside T64N2(NPN+2m cable)

GLCH8D-400W series

GLCH8D-400W series specification

Specification
Specification
Repeatability mm ± 0.005
Ball Screw Lead mm 6 12 24
Maximum Rotating Speed RPM 3600 3600 3600
Maximum Linear Speed mm/s 360 720 1440
Maximum Payload Horizontal Kg 105 85 40
Vertical Kg 30 20 10
Rated Thrust N 1156 578 289
Stroke pitch mm 50-1050mm/50 intervals (50 Increments)
Maximum acceleration G 0.37 0.73 1.47
Ball Screw Basic Dynamic Load rating Ca N 7733 5855 3007
Basic Static Load rating Coa N 14200 10401 5414
Linear Guide Dynamic horizontal 100km 18601
Static horizontal N 34189
Fixed Bearing Basic Dynamic Load rating N 8447
Static Load Rating Cr N 5060
AC Servo Moter Output W 400
Ball Screw ⌀ mm C7⌀14
Coupling mm 10X14
Home Sensor Outside T64N2(NPN+2m cable)