Alignment Stage

Toyo Alignment Stage is a critical component in the semiconductor industry that is used to align and position wafers accurately during the manufacturing process. The alignment stage is typically used in the front-end of the semiconductor manufacturing process, where wafers are patterned and etched. The alignment stage uses a combination of mechanical and optical techniques to ensure that the wafers are precisely aligned with the lithography equipment. The alignment stage is a critical component of the semiconductor manufacturing process, as it ensures that the wafers are accurately positioned and aligned, which is essential for producing high-quality semiconductor devices.

LXY series is a low-resistance friction design equipped with an iron core linear motor. Its appearance is light weight and has a large hollow structure design. Due to large hollow design it can be processed on both sides and placed in an optical inspection machine.

Diverse track designs such as built-in rails, crossed roller guides, and standard linear rails can be selected to support coreless rails.