Cleanroom Actuator

In cleanroom environments, electric actuators play a crucial role in ensuring precision, quality, and cleanliness. We offer electric actuators that are suitable for cleanroom applications, with high demands on speed, payload, and stroke paths. Maximum payload of these electric actuators can be 150 Kg, have stroke paths of up to 1,500 mm. They are designed to minimize particle emissions and ingress of particles in cleanroom applications, adhering to stringent cleanliness requirements. Furthermore, the products are tested and classified in accordance with ISO standards, making them suitable for use in cleanrooms.

Features

Cleanroom compatibility: These actuators are designed to minimize particle emissions and ingress, meeting the stringent cleanliness requirements of cleanroom environments.
Precision and repeatability: Electric actuators offer high precision and repeatability, ensuring accuracy in positioning and movement within the cleanroom.
High speed and acceleration: These actuators can achieve high speeds of up to 1,600 mm/s, allowing for efficient and rapid movement within the cleanroom environment.
Stroke paths: Electric actuators can provide stroke paths of up to 1,500 mm, accommodating a wide range of motion requirements in cleanroom applications.
Compliance with standards: The electric actuators are tested and classified in accordance with ISO standards, ensuring their suitability for use in cleanrooms and other controlled environments.

Applications

Semi-conductor manufacturing, Wafer piling, Wafer surface cleaning device, Food processing industry, Optics and Photonics, Medical Device Manufacturing, Pharmaceutical and Biotechnology

ECH14-200W series

ECH14-200W series specification

Performance	Repeatability		mm	±0.005
	Ball Screw Lead		mm	5	10	20	32
	Maximum Rotating Speed		(mm/s)	3600	3600	3600	3600
	Maximum Linear Speed		(mm/s)	300	600	1200	1920
	Maximum Payload	Horizontal	kg	95	75	35	15
	Maximum Payload	Vertical	kg	27	18	7	-
	Rated Thrust		N	683	341	174	107
	Stroke Pitch		mm	50-1050mm/50 intervals (50 Increments)
Parts	AC Servo Moter Output		W	200
	Ball Screw Ø		mm	C7Ø16
	High Rigidity Linear Guide		mm	W15XH12.5
	Coupling		mm	10X14X11
	Home Sensor	Outside		T62N2(NPN+2M cable)
	Home Sensor	Built-in		T64N2(NPN+2M cable)

Brand	Mark	Brake	Watt	AC-Voltage	Motor Model	Driver Model
Mitsubishi	M	No Brake (Horizontal Type)	200	220	HG-KR13	MR-J4-20A
Mitsubishi	M	With Brake (Vertical type)	200	220	HG-KR13B	MR-J4-20A
Panasonic	P	No Brake (Horizontal Type)	200	220	MSMD012G1U	MADHT1507
Panasonic	P	With Brake (Vertical type)	200	220	MSMD012G1V	MADHT1507
Delta	T	No Brake (Horizontal Type)	200	220	ECMA-C20401ES	ASD-B20221-B
Delta	T	With Brake (Vertical type)	200	220	ECMA-C20401ES	ASD-B20221-B

ECH14-400W series

ECH14-400W series specification

Performance	Repeatability		mm	±0.005
	Ball Screw Lead		mm	5	10	20	32
	Maximum Rotating Speed		RPM	3600	3600	3600	3600
	Maximum Linear Speed		mm/s	300	600	1200	1920
	Maximum Payload	Horizontal	kg	110	88	40	30
	Maximum Payload	Vertical	kg	33	22	10	8
	Rated Thrust		N	1388	694	347	217
	Stroke		N	50-1050mm/50 intervals (50 Increments)
Parts	AC Servo Moter Output		W	400
	Ball Screw Ø		mm	C7Ø16
	High Rigidity Linear Guide		mm	W15XH12.5
	Coupling		mm	10×14
	Home Sensor	Outside		T62N2(NPN+2M cable)
	Home Sensor	Built-in		T62N2(NPN+2M cable)

Brand	Mark	Brake	Watt	AC-Voltage	Motor Model	Driver Model
Mitsubishi	M	No Brake (Horizontal Type)	400	220	HG-KR43	MR-J4-40A
Mitsubishi	M	With Brake (Vertical type)	400	220	HG-KR43B	MR-J4-40A
Panasonic	P	No Brake (Horizontal Type)	400	220	MHMD042G1U	MADHT2510
Panasonic	P	With Brake (Vertical type)	400	220	MHMD042G1V	MBDHT2510
Delta	T	No Brake (Horizontal Type)	400	220	ECMA-C20604ES	ASD-B20421-B
Delta	T	With Brake (Vertical type)	400	220	ECMA-C20604ES	ASD-B20421-B

ECH17-400W series

ECH17-400W series specification

Performance	Repeatability		mm	±0.005
	Lead		mm	5	10	20	40
	Maximum Rotating Speed		RPM	3600	3600	3600	3600
	Maximum Linear Speed		mm/s	300	600	1200	2400
	Maximum Payload	Horizontal	kg	120	110	75	22
	Maximum Payload	Vertical	kg	40	30	14	7
	Rated Thrust		N	1388	694	347	174
	Stroke		mm	50-1250mm/50 intervals (50 Increments)
Parts	AC Servo Moter Output		W	400
	Ball Screw Ø		mm	C7Ø20
	High Rigidity Linear Guide		mm	W20XH15
	Coupling		mm	12×14
	Home Sensor	Outside		T62N2(NPN+2M cable)
	Home Sensor	Built-in		T64N2(NPN+2M cable)

Brand	Mark	Brake	Watt	AC-Voltage	Motor Model	Driver Model
Mitsubishi	M	No Brake (Horizontal Type)	400	220	HG-KR43	MR-J4-40A
Mitsubishi	M	With Brake (Vertical type)	400	220	HG-KR43B	MR-J4-40A
Panasonic	P	No Brake (Horizontal Type)	400	220	MHMD042G1U	MBDHT2510
Panasonic	P	With Brake (Vertical type)	400	220	MHMD042G1V	MADHT2510
Delta	T	No Brake (Horizontal Type)	400	220	ECMA-C20604ES	ASD-B20421-B
Delta	T	With Brake (Vertical type)	400	220	ECMA-C20604ES	ASD-B20421-B

ECH17-750W series

ECH17-750W series specification

Performance	Repeatability		mm	±0.005
	Lead		mm	5	10	20	40
	Maximum Rotating Speed		RPM	3600	3600	3600	3600
	Maximum Linear Speed		mm/s	300	600	1200	2400
	Maximum Payload	Horizontal	kg	120	120	83	43
	Maximum Payload	Vertical	kg	50	40	25	12
	Rated Thrust		N	2563	1281	640	320
	Stroke		mm	50-1250mm/50 intervals (50 Increments)
Parts	AC Servo Moter Output		W	750
	Ball Screw Ø		mm	C7Ø20
	High Rigidity Linear Guide		mm	W20XH15
	Coupling		mm	12×19
	Home Sensor	Outside		T62N2(NPN+2M cable)
	Home Sensor	Built-in		T64N2(NPN+2M cable)

Brand	Mark	Brake	Watt	AC-Voltage	Motor Model	Driver Model
Mitsubishi	M	No Brake (Horizontal Type)	750	220	HG-KR73	MR-J4-70A
Mitsubishi	M	With Brake (Vertical type)	750	220	HG-KR73B	MR-J4-70A
Panasonic	P	No Brake (Horizontal Type)	750	220	MHMD082G1U	MCDHT3520
Panasonic	P	With Brake (Vertical type)	750	220	MHMD082G1V	MCDHT3510
Delta	T	No Brake (Horizontal Type)	750	220	ECMA-C20807ES	ASD-B20721-B
Delta	T	With Brake (Vertical type)	750	220	ECMA-C20807FS	ASD-B20721-B

ECH22-750W series

ECH22-750W series specification

Performance	Repeatability		mm	±0.005
	Ball Screw Lead		mm	5	10	25	40
	Maximum Rotating Speed		RPM	3600	3600	3600	3600
	Maximum Linear Speed		mm/s	300	600	1500	2400
	Maximum Payload	Horizontal	kg	150	150	105	43
	Maximum Payload	Vertical	kg	55	45	20	12
	Rated Thrust		N	2565	1281	640	320
	Stroke		mm	50-1500mm/50 intervals (50 Increments)
Parts	AC Servo Moter Output		W	750
	Ball Screw Ø		mm	C7Ø25			C7Ø20
	High Rigidity Linear Guide		mm	W23XH18
	Coupling		mm	17×19			12×19
	Home Sensor	Outside		T62N2(NPN+2M cable)
	Home Sensor	Built-in		T64N2(NPN+2M cable)

Brand	Mark	Brake	Watt	AC-Voltage	Motor Model	Driver Model
Mitsubishi	M	No Brake (Horizontal Type)	750	220	HG-KR73	MR-J4-70A
Mitsubishi	M	With Brake (Vertical type)	750	220	HG-KR73B	MR-J4-70A
Panasonic	P	No Brake (Horizontal Type)	750	220	MHMD082G1U	MCDHT3520
Panasonic	P	With Brake (Vertical type)	750	220	MHMD082G1V	MCDHT3520
Delta	T	No Brake (Horizontal Type)	750	220	ECMA-C20807ES	ASD-B20721-B
Delta	T	With Brake (Vertical type)	750	220	ECMA-C20807FS	ASD-B20721-B

ECH2-14-400W series

ECH2-14-400W series specification

Specification
Repeatability		mm	± 0.005
Ball Screw Lead		mm	6		12		24
Maximum Rotating Speed		RPM	3600	3600	3600	3600	3600	3600
Maximum Linear Speed		mm/s	360	300	720	600	1440	1200
Maximum Payload	Horizontal	Kg	110	110	88	88	40	50
	Vertical(No regenerative resistor)	Kg	29	33	15	16	9	10
	Vertical(External 200W regenerative resistor)	Kg	40	40	26	26	20	20
Rated Thrust		N	1130		565		283
Stroke pitch		mm	50-1200mm/50 intervals (50 Increments)
Maximum acceleration		G	0.18	0.15	0.37	0.31	0.73	0.61
Ball Screw	Basic Dynamic Load rating Ca	N	7740		5866		3012
Ball Screw	Basic Static Load rating Coa	N	14215		10408		5415
Linear Guide	Dynamic horizontal	100km	29573
Linear Guide	Static horizontal	N	63504
Fixed Bearing	Basic Dynamic Load rating	N	8447
Fixed Bearing	Static Load Rating Cr(N)	N	5060
AC Servo Moter Output		W	400
Ball Screw ⌀		mm	C7⌀14
Linear Guide		mm	W15XH12.5
Coupling		mm	14X10
Home Sensor	Outside		T64N(NPN)

Brand	Mark	Brake	Watt	AC-Voltage	Motor Model	Driver Model
Mitsubishi	M	No Brake (Horizontal Type)	750	220	HG-KR73	MR-J4-70A
Mitsubishi	M	With Brake (Vertical type)	750	220	HG-KR73B	MR-J4-70A
Panasonic	P	No Brake (Horizontal Type)	750	220	MHMD082G1U	MCDHT3520
Panasonic	P	With Brake (Vertical type)	750	220	MHMD082G1V	MCDHT3520
Delta	T	No Brake (Horizontal Type)	750	220	ECMA-C20807ES	ASD-B20721-B
Delta	T	With Brake (Vertical type)	750	220	ECMA-C20807FS	ASD-B20721-B

ECH2-17-400W series

ECH2-17-400W series specification

Specification
Repeatability		mm	± 0.005
Ball Screw Lead		mm	5		10		20		40
Maximum Rotating Speed		RPM	3600	3000	3600	3000	3600	3000	3600	3000
Maximum Linear Speed		mm/s	300	250	600	500	1200	1000	2400	2000
Maximum Payload	Horizontal	Kg	120	120	110	110	75	85	15	22
	Vertical(No regenerative resistor)	Kg	40	50	24	26	10	11	9	10
	Vertical(External 200W regenerative resistor)	Kg	50	50	30	30	17	17	15	15
Rated Thrust		N	1356		678		339		170
Stroke pitch		mm	50-1500mm/50 intervals (50 Increments)
Maximum acceleration		G	0.15	0.13	0.31	0.25	0.61	0.51	1.22	1.02
Ball Screw	Basic Dynamic Load rating Ca	N	17795		10295		5414		6404
Ball Screw	Basic Static Load rating Coa	N	45617		22964		10877		15667
Linear Guide	Dynamic horizontal	100km	29573
Linear Guide	Static horizontal	N	63504
Fixed Bearing	Basic Dynamic Load rating	N	9666
Fixed Bearing	Static Load Rating Cr(N)	N	6400
AC Servo Moter Output		W	400
Ball Screw ⌀		mm	C7⌀20
Linear Guide		mm	W15XH12.5
Coupling		mm	14X12
Home Sensor	Outside		T64N2(NPN)

Brand	Mark	Brake	Watt	AC-Voltage	Motor Model	Driver Model
Mitsubishi	M	No Brake (Horizontal Type)	750	220	HG-KR73	MR-J4-70A
Mitsubishi	M	With Brake (Vertical type)	750	220	HG-KR73B	MR-J4-70A
Panasonic	P	No Brake (Horizontal Type)	750	220	MHMD082G1U	MCDHT3520
Panasonic	P	With Brake (Vertical type)	750	220	MHMD082G1V	MCDHT3520
Delta	T	No Brake (Horizontal Type)	750	220	ECMA-C20807ES	ASD-B20721-B
Delta	T	With Brake (Vertical type)	750	220	ECMA-C20807FS	ASD-B20721-B

ECH2-22-750W series

ECH2-22-750W series specification

Specification
Repeatability		mm	± 0.005
Ball Screw Lead		mm	5		10		25
Maximum Rotating Speed		RPM	3600	3000	3600	3000	3600	3000
Maximum Linear Speed		mm/s	300	250	600	500	1500	1250
Maximum Payload	Horizontal(No regenerative resistor)	Kg	150	150	150	150	40	80
	Horizontal(External 200W regenerative resistor)	Kg	-	-	-	-	100	105
	Vertical(No regenerative resistor)	Kg	55	60	30	33	13	15
	Vertical(External 200W regenerative resistor)	Kg	60	65	35	38	18	23
Rated Thrust		N	2553		1276		511
Stroke pitch		mm	50-1800mm/50 intervals (50 Increments)
Maximum acceleration		G	0.15	0.13	0.31	0.25	0.76	0.64
Ball Screw	Basic Dynamic Load rating Ca	N	11116		16069		8270
Ball Screw	Basic Static Load rating Coa	N	27338		45450		21572
Linear Guide	Dynamic horizontal	100km	45517
Linear Guide	Static horizontal	N	98820
Fixed Bearing	Basic Dynamic Load rating	N	22093
Fixed Bearing	Static Load Rating Cr(N)	N	15100
AC Servo Moter Output		W	750
Ball Screw ⌀		mm	C7⌀25
Linear Guide		mm	W20XH16.3
Coupling		mm	19X17
Home Sensor	Outside		T64N2(NPN)

Brand	Mark	Brake	Watt	AC-Voltage	Motor Model	Driver Model
Mitsubishi	M	No Brake (Horizontal Type)	750	220	HG-KR73	MR-J4-70A
Mitsubishi	M	With Brake (Vertical type)	750	220	HG-KR73B	MR-J4-70A
Panasonic	P	No Brake (Horizontal Type)	750	220	MHMD082G1U	MCDHT3520
Panasonic	P	With Brake (Vertical type)	750	220	MHMD082G1V	MCDHT3520
Delta	T	No Brake (Horizontal Type)	750	220	ECMA-C20807ES	ASD-B20721-B
Delta	T	With Brake (Vertical type)	750	220	ECMA-C20807FS	ASD-B20721-B

ECH2-14D series

ECH2-14D series specification

Specification
Repeatability		mm	± 0.005
Ball Screw Lead		mm	6		12		24
Maximum Rotating Speed		RPM	3600	3000	3600	3000	3600	3000
Maximum Linear Speed		mm/s	360	300	720	600	1440	1200
Maximum Payload	Horizontal	Kg	110	110	88	88	40	50
	Vertical(No regenerative resistor)	Kg	29	33	15	16	9	10
	Vertical(External 200W regenerative resistor)	Kg	40	40	26	26	20	20
Rated Thrust		N	1130		565		283
Stroke pitch		mm	50-950mm/50 intervals (50 Increments)
Maximum acceleration		G	0.18	0.15	0.37	0.31	0.73	0.61
Ball Screw	Basic Dynamic Load rating Ca	N	7740		5866		3012
Ball Screw	Basic Static Load rating Coa	N	14215		10408		5415
Linear Guide	Dynamic horizontal	100km	48193
Linear Guide	Static horizontal	N	103488
Fixed Bearing	Basic Dynamic Load rating	N	8447
Fixed Bearing	Static Load Rating Cr(N)	N	5060
AC Servo Moter Output		W	400
Ball Screw ⌀		mm	C7⌀14
Linear Guide		mm	W15XH12.5
Coupling		mm	14X10
Home Sensor	Outside		T64N(NPN)

Brand	Mark	Brake	Watt	AC-Voltage	Motor Model	Driver Model
Mitsubishi	M	No Brake (Horizontal Type)	750	220	HG-KR73	MR-J4-70A
Mitsubishi	M	With Brake (Vertical type)	750	220	HG-KR73B	MR-J4-70A
Panasonic	P	No Brake (Horizontal Type)	750	220	MHMD082G1U	MCDHT3520
Panasonic	P	With Brake (Vertical type)	750	220	MHMD082G1V	MCDHT3520
Delta	T	No Brake (Horizontal Type)	750	220	ECMA-C20807ES	ASD-B20721-B
Delta	T	With Brake (Vertical type)	750	220	ECMA-C20807FS	ASD-B20721-B

ECH2-17D series

ECH2-17D series specification

Specification
Repeatability		mm	± 0.005
Ball Screw Lead		mm	5		10		20		40
Maximum Rotating Speed		RPM	3600	3000	3600	3000	3600	3000	3600	3000
Maximum Linear Speed		mm/s	300	250	600	500	1200	1000	2400	2000
Maximum Payload	Horizontal	Kg	120	120	110	110	75	85	15	22
	Vertical(No regenerative resistor)	Kg	40	50	24	26	10	11	9	10
	Vertical(External 200W regenerative resistor)	Kg	50	50	30	30	17	17	15	15
Rated Thrust		N	1356		678		339		170
Stroke pitch		mm	50-1250mm/50 intervals (50 Increments)
Maximum acceleration		G	0.15	0.13	0.31	0.25	0.61	0.51	1.22	1.02
Ball Screw	Basic Dynamic Load rating Ca	N	17795		10295		5414		6404
Ball Screw	Basic Static Load rating Coa	N	45617		22964		10877		15667
Linear Guide	Dynamic horizontal	100km	48193
Linear Guide	Static horizontal	N	103488
Fixed Bearing	Basic Dynamic Load rating	N	9666
Fixed Bearing	Static Load Rating Cr(N)	N	6400
AC Servo Moter Output		W	400
Ball Screw ⌀		mm	C7⌀20
Linear Guide		mm	W15XH12.5
Coupling		mm	14X12
Home Sensor	Outside		T64N2(NPN)

Brand	Mark	Brake	Watt	AC-Voltage	Motor Model	Driver Model
Mitsubishi	M	No Brake (Horizontal Type)	750	220	HG-KR73	MR-J4-70A
Mitsubishi	M	With Brake (Vertical type)	750	220	HG-KR73B	MR-J4-70A
Panasonic	P	No Brake (Horizontal Type)	750	220	MHMD082G1U	MCDHT3520
Panasonic	P	With Brake (Vertical type)	750	220	MHMD082G1V	MCDHT3520
Delta	T	No Brake (Horizontal Type)	750	220	ECMA-C20807ES	ASD-B20721-B
Delta	T	With Brake (Vertical type)	750	220	ECMA-C20807FS	ASD-B20721-B

ECH2-22D series

ECH2-22D series specification

Specification
Repeatability		mm	± 0.005
Ball Screw Lead		mm	5		10		25
Maximum Rotating Speed		RPM	3600	3000	3600	3000	3600	3000
Maximum Linear Speed		mm/s	300	250	600	500	1500	1250
Maximum Payload	Horizontal(No regenerative resistor)	Kg	150	150	150	150	40	80
	Horizontal(External 200W regenerative resistor)	Kg	-	-	-	-	100	105
	Vertical(No regenerative resistor)	Kg	55	60	30	33	13	15
	Vertical(External 200W regenerative resistor)	Kg	60	65	35	38	18	23
Rated Thrust		N	2553		1276		511
Stroke pitch		mm	50-1500mm/50 intervals (50 Increments)
Maximum acceleration		G	0.15	0.13	0.31	0.25	0.76	0.64
Ball Screw	Basic Dynamic Load rating Ca	N	11116		16069		8270
Ball Screw	Basic Static Load rating Coa	N	27338		45450		21572
Linear Guide	Dynamic horizontal	100km	74176
Linear Guide	Static horizontal	N	161040
Fixed Bearing	Basic Dynamic Load rating	N	22093
Fixed Bearing	Static Load Rating Cr(N)	N	15100
AC Servo Moter Output		W	750
Ball Screw ⌀		mm	C7⌀25
Linear Guide		mm	W20XH16.3
Coupling		mm	19X17
Home Sensor	Outside		T64N2(NPN)

Brand	Mark	Brake	Watt	AC-Voltage	Motor Model	Driver Model
Mitsubishi	M	No Brake (Horizontal Type)	750	220	HG-KR73	MR-J4-70A
Mitsubishi	M	With Brake (Vertical type)	750	220	HG-KR73B	MR-J4-70A
Panasonic	P	No Brake (Horizontal Type)	750	220	MHMD082G1U	MCDHT3520
Panasonic	P	With Brake (Vertical type)	750	220	MHMD082G1V	MCDHT3520
Delta	T	No Brake (Horizontal Type)	750	220	ECMA-C20807ES	ASD-B20721-B
Delta	T	With Brake (Vertical type)	750	220	ECMA-C20807FS	ASD-B20721-B

ECH2-17M-400W series

ECH2-17M-400W series specification

Specification
Repeatability		mm	± 0.005
Ball Screw Lead		mm	5	10	20	32
Maximum Rotating Speed		rpm	3600	3600	3600	3600
Maximum Linear Speed		mm/s	300	600	1200	1920
Maximum Payload	Horizontal	Kg	110	90	40	30
Maximum Payload	Vertical	Kg	33	22	10	8
Rated Thrust		N	1388	694	347	218
Stroke pitch		mm	800-2200mm/50 intervals (50 Increments)
AC Servo Moter Output		W	400
Ball Screw ⌀		mm	C7⌀16
Linear Guide		mm	W15XH12.5
Coupling		mm	10X14
Home Sensor	Outside		T64N(NPN+2M Cable)

Brand	Mark	Brake	Watt	AC-Voltage	Motor Model	Driver Model
Mitsubishi	M	No Brake (Horizontal Type)	750	220	HG-KR73	MR-J4-70A
Mitsubishi	M	With Brake (Vertical type)	750	220	HG-KR73B	MR-J4-70A
Panasonic	P	No Brake (Horizontal Type)	750	220	MHMD082G1U	MCDHT3520
Panasonic	P	With Brake (Vertical type)	750	220	MHMD082G1V	MCDHT3520
Delta	T	No Brake (Horizontal Type)	750	220	ECMA-C20807ES	ASD-B20721-B
Delta	T	With Brake (Vertical type)	750	220	ECMA-C20807FS	ASD-B20721-B

ECH2-17M-750W series

ECH2-17M-750W series specification

Specification
Repeatability		mm	± 0.005
Ball Screw Lead		mm	5	10	20	32
Maximum Rotating Speed		rpm	3600	3600	3600	3600
Maximum Linear Speed		mm/s	300	600	1200	1920
Maximum Payload	Horizontal	Kg	120	95	50	35
Maximum Payload	Vertical	Kg	40	25	15	12
Rated Thrust		N	2563	1281	640	400
Stroke pitch		mm	800-2200mm/50 intervals (50 Increments)
AC Servo Moter Output		W	750
Ball Screw ⌀		mm	C7⌀16
Linear Guide		mm	W15XH12.5
Coupling		mm	10X19
Home Sensor	Outside		T64N2(NPN+2M Cable)

Brand	Mark	Brake	Watt	AC-Voltage	Motor Model	Driver Model
Mitsubishi	M	No Brake (Horizontal Type)	750	220	HG-KR73	MR-J4-70A
Mitsubishi	M	With Brake (Vertical type)	750	220	HG-KR73B	MR-J4-70A
Panasonic	P	No Brake (Horizontal Type)	750	220	MHMD082G1U	MCDHT3520
Panasonic	P	With Brake (Vertical type)	750	220	MHMD082G1V	MCDHT3520
Delta	T	No Brake (Horizontal Type)	750	220	ECMA-C20807ES	ASD-B20721-B
Delta	T	With Brake (Vertical type)	750	220	ECMA-C20807FS	ASD-B20721-B

ECH2-22M series

ECH2-22M series specification

Specification
Repeatability		mm	± 0.005
Ball Screw Lead		mm	5	10	20	40
Maximum Rotating Speed		rpm	3600	3600	3600	3600
Maximum Linear Speed		mm/s	300	600	1200	2400
Maximum Payload	Horizontal	Kg	130	130	85	43
Maximum Payload	Vertical	Kg	50	40	25	12
Rated Thrust		N	2563	1281	640	400
Stroke pitch		mm	850-2400mm/50 intervals (50 Increments)
AC Servo Moter Output		W	750
Ball Screw ⌀		mm	C7⌀20
Linear Guide		mm	W20XH15
Coupling		mm	12X19
Home Sensor	Outside		T64N2(NPN+2M Cable)

Brand	Mark	Brake	Watt	AC-Voltage	Motor Model	Driver Model
Mitsubishi	M	No Brake (Horizontal Type)	750	220	HG-KR73	MR-J4-70A
Mitsubishi	M	With Brake (Vertical type)	750	220	HG-KR73B	MR-J4-70A
Panasonic	P	No Brake (Horizontal Type)	750	220	MHMD082G1U	MCDHT3520
Panasonic	P	With Brake (Vertical type)	750	220	MHMD082G1V	MCDHT3520
Delta	T	No Brake (Horizontal Type)	750	220	ECMA-C20807ES	ASD-B20721-B
Delta	T	With Brake (Vertical type)	750	220	ECMA-C20807FS	ASD-B20721-B