cleanroom Actuator
The Toyo GCH Series actuators are known for their precision, reliability, and performance in various industrial applications, including semiconductor manufacturing. Cleanroom actuators must comply with ISO standards, particularly ISO 14644-1, which outlines the maximum permissible particle count in the air of a cleanroom environment. Actuators used in semiconductor cleanrooms are typically classified in accordance with ISO standards to ensure they meet the required cleanliness levels.
Toyo GCH Series actuators are engineered to provide smooth and accurate motion control, making them well-suited for tasks that require precise positioning and control, such as wafer handling, equipment positioning, and other critical processes within semiconductor cleanrooms.
Features
- Low Particle Emission : Cleanroom actuators are designed to minimize particle generation to prevent contamination of the cleanroom environment.
- Compliance with Cleanroom Standards : These actuators adhere to specific cleanroom standards such as ISO 14644-1 to ensure that they meet the cleanliness and particle control requirements of the cleanroom environment.
- Smooth and Precise Motion Control : Cleanroom actuators provide accurate and smooth motion control, which is crucial for applications that require precision positioning and movement.
- Sealed Design : Cleanroom actuators feature sealed designs to prevent the ingress of contaminants and to maintain the cleanliness of the actuator itself.
Applications
Semi-conductor manufacturing, Wafer piling, Wafer surface cleaning device, Food processing industry
GCH4-50W series
GCH4-50W series specification
| Performance | Repeatability | mm | ± 0.005 | |||
|---|---|---|---|---|---|---|
| Lead | mm | 2 | 6 | 12 | ||
| Maximum Rotating Speed | RPM | 3000 | 3600 | 3600 | ||
| Maximum Linear Speed | mm/s | 100 | 360 | 720 | ||
| Maximum Payload | Horizontal | kg | 25 | 20 | 12 | |
| Vertical | kg | 8 | 5 | 2 | ||
| Rated Thrust | N | 424 | 141 | 71 | ||
| Stroke | N | 50-1000mm/50 intervals (50 Increments) | ||||
| Maximum acceleration | G | 0.3 | 0.3 | 0.6 | ||
| Ball Screw | Basic Dynamic Load rating Ca | N | 2265 | 2537 | 1740 | |
| Basic Static Load rating Coa | N | 4839 | 4569 | 3052 | ||
| Linear Guide | Dynamic horizontal | 100km | 4835 | |||
| Static horizontal | N | 12678 | ||||
| Fixed Bearing | Basic Dynamic Load rating | N | 5361 | |||
| Static Load Rating Cr | N | 2880 | ||||
| Parts | AC Servo Moter Output | W | 50 | |||
| Ball Screw Ø | mm | C7Ø10 | ||||
| Coupling | mm | 7×8 | ||||
| Home Sensor | Outside | T64N2(NPN) | ||||
| Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
|---|---|---|---|---|---|---|
| Mitsubishi | M | No Brake (Horizontal Type) |
50 | 220 | HG-KR053 | MR-J4-10A |
| With Brake (Vertical type) |
50 | 220 | HG-KR053B | MR-J4-10A | ||
| Panasonic | P | No Brake (Horizontal Type) |
50 | 220 | MSMD5A2G1U | MADHT1505 |
| With Brake (Vertical type) |
50 | 220 | MSMD5A2G1V | MADHT1505 | ||
| Delta | T | No Brake (Horizontal Type) |
50 | 220 | ECMA-C10401ES | ASD-B20121-B |
| With Brake (Vertical type) |
50 | 220 | ECMA-C1040FES | ASD-B20121-B |
GCH4-100W series
GCH4-100W series specification
| Performance | Repeatability | mm | ± 0.005 | |||
|---|---|---|---|---|---|---|
| Lead | mm | 2 | 6 | 12 | ||
| Maximum Rotating Speed | rpm | 3000 | 3600 | 3600 | ||
| Maximum Linear Speed | mm/s | 100 | 360 | 720 | ||
| Maximum Payload | Horizontal | kg | 25 | 20 | 20 | |
| Vertical | kg | 8 | 8 | 3.5 | ||
| Vertical with regenrative resistor | kg | 8 | 15 | 8 | ||
| Rated Thrust | N | 854 | 285 | 142 | ||
| Stroke | N | 50-1000mm/50 intervals (50 Increments) | ||||
| Maximum acceleration | G | 0.3 | 0.3 | 0.6 | ||
| Ball Screw | Basic Dynamic Load rating Ca | N | 2265 | 2537 | 1740 | |
| Basic Static Load rating Coa | N | 4839 | 4569 | 3052 | ||
| Linear Guide | Dynamic horizontal | (100km) | 4835 | |||
| Static horizontal | N | 12678 | ||||
| Fixed Bearing | Basic Dynamic Load rating | N | 5361 | |||
| Static Load Rating Cr | N | 2880 | ||||
| Parts | AC Servo Moter Output | W | 100 | |||
| Ball Screw Ø | mm | C7Ø10 | ||||
| Coupling | mm | 7×8 | ||||
| Home Sensor | Outside | T64N2 (NPN) | ||||
| Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
|---|---|---|---|---|---|---|
| Mitsubishi | M | No Brake (Horizontal Type) |
100 | 220 | HG-KR13 | MR-J4-10A |
| With Brake (Vertical type) |
100 | 220 | HG-KR13B | MR-J4-10A | ||
| Panasonic | P | No Brake (Horizontal Type) |
100 | 220 | MSMD012G1U | MADHT1505 |
| With Brake (Vertical type) |
100 | 220 | MSMD012G1V | MADHT1505 | ||
| Delta | T | No Brake (Horizontal Type) |
100 | 220 | ECMA-C20401ES | ASD-B20121-B |
| With Brake (Vertical type) |
100 | 220 | ECMA-C20401ES | ASD-B20121-B |
GCH5-100W series
GCH5-100W series specification
| Performance | Ballscrew Accuracy Grade code | L | C | ||||
|---|---|---|---|---|---|---|---|
| Ballscrew Accuracy Grade | C7 | C5 | |||||
| Repeatability | mm | ± 0.005 | ± 0.003 | ||||
| Stroke | mm | 50-1050mm/50 intervals(50 Increments) | 50-300mm/50 intervals(50 Increments) | ||||
| Lead | mm | 2 | 5 | 10 | 20 | ||
| Maximum Rotating Speed | RPM | 3000 | 3600 | 3600 | 3600 | ||
| Maximum Linear Speed | mm/s | 100 | 300 | 600 | 1200 | ||
| Maximum Payload | Horizontal | kg | 30 | 40 | 24 | 12 | |
| Vertical | kg | 10 | 10 | 5 | 2.5 | ||
| Vertical with regenrative resistor | kg | 10 | 12 | 6 | 3 | ||
| Rated Thrust | N | 854 | 341 | 170 | 85 | ||
| Maximum acceleration | G | 0.1 | 0.3 | 0.3 | 0.6 | ||
| Ball Screw | Basic Dynamic Load rating Ca | N | 2411 | 4829 | 4680 | 11284 | |
| Basic Static Load rating Coa | N | 5779 | 7836 | 7649 | 20410 | ||
| Linear Guide | Dynamic horizontal | (100km) | 5904 | ||||
| Static horizontal | N | 16904 | |||||
| Fixed Bearing | Basic Dynamic Load rating | N | 5361 | ||||
| Static Load Rating Cr | N | 2880 | |||||
| Parts | AC Servo Moter Output | W | 100 | ||||
| Ball Screw Ø | mm | Ø12 | |||||
| Coupling | mm | 7×8 | |||||
| Home Sensor | Outside | T64N2(NPN) | |||||
| Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
|---|---|---|---|---|---|---|
| Mitsubishi | M | No Brake (Horizontal Type) |
100 | 220 | HG-KR13 | MR-J4-10A |
| With Brake (Vertical type) |
100 | 220 | HG-KR13B | MR-J4-10A | ||
| Panasonic | P | No Brake (Horizontal Type) |
100 | 220 | MSMD012G1U | MADHT1505 |
| With Brake (Vertical type) |
100 | 220 | MSMD012G1V | MADHT1505 | ||
| Delta | T | No Brake (Horizontal Type) |
100 | 220 | ECMA-C20401ES | ASD-B20121-B |
| With Brake (Vertical type) |
100 | 220 | ECMA-C20401FS | ASD-B20121-B |
GCH8-200W series
GCH8-200W series specification
| Performance | Ballscrew Accuracy Grade code | L | C | ||||
|---|---|---|---|---|---|---|---|
| Ballscrew Accuracy Grade | C7 | C5 | |||||
| Repeatability | mm | ± 0.005 | ± 0.003 | ||||
| Stroke | mm | 50-1250mm/50 intervals(50 Increments) | 50-950mm/50 intervals(50 Increments) | ||||
| Lead | mm | 5 | 10 | 20 | |||
| Maximum Rotating Speed | RPM | 3000 | 3600 | 3600 | |||
| Maximum Linear Speed | mm/s | 300 | 600 | 1200 | |||
| Maximum Payload | Horizontal | kg | 100 | 80 | 40 | ||
| Vertical | kg | 15 | 8 | 3 | |||
| Vertical with regenrative resistor | kg | 30 | 20 | 8 | |||
| Rated Thrust | N | 683 | 341 | 174 | |||
| Maximum acceleration | G | 0.3 | 0.3 | 0.6 | |||
| Ball Screw | Basic Dynamic Load rating Ca | N | 8042 | 6300 | 4152 | ||
| Basic Static Load rating Coa | N | 15088 | 11596 | 7439 | |||
| Linear Guide | Dynamic horizontal | (100km) | 18620 | ||||
| Static horizontal | N | 34230 | |||||
| Fixed Bearing | Basic Dynamic Load rating | N | 8447 | ||||
| Static Load Rating Cr | N | 5060 | |||||
| Parts | AC Servo Moter Output | W | 200 | ||||
| Ball Screw Ø | mm | Ø16 | |||||
| Coupling | mm | 10×14/11 | |||||
| Home Sensor | Outside | T64N2(NPN) | |||||
| Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
|---|---|---|---|---|---|---|
| Mitsubishi | M | No Brake (Horizontal Type) |
200 | 220 | HG-KR23 | MR-J4-20A |
| With Brake (Vertical type) |
200 | 220 | HG-KR23B | MR-J4-20A | ||
| Panasonic | P | No Brake (Horizontal Type) |
200 | 220 | MHMD022G1U | MADHT1507 |
| With Brake (Vertical type) |
200 | 220 | MHMD022G1V | MADHT1507 | ||
| Delta | T | No Brake (Horizontal Type) |
200 | 220 | ECMA-C20602ES | ASD-B20221-B |
| With Brake (Vertical type) |
200 | 220 | ECMA-C20602FS | ASD-B20221-B |
GCH8-400W series
GCH8-400W series specification
| Performance | Ballscrew Accuracy Grade code | L | C | ||||
|---|---|---|---|---|---|---|---|
| Ballscrew Accuracy Grade | C7 | C5 | |||||
| Repeatability | mm | ± 0.005 | ± 0.003 | ||||
| Stroke | mm | 50-1250mm/50 intervals(50 Increments) | 50-950mm/50 intervals(50 Increments) | ||||
| Lead | mm | 5 | 10 | 20 | |||
| Maximum Rotating Speed | RPM | 3600 | 3600 | 3600 | |||
| Maximum Linear Speed | mm/s | 300 | 600 | 1200 | |||
| Maximum Payload | Horizontal | kg | 110 | 88 | 40 | ||
| Vertical | kg | 33 | 21 | 8 | |||
| Vertical with regenrative resistor | kg | 33 | 30 | 15 | |||
| Rated Thrust | N | 1388 | 694 | 347 | |||
| Maximum acceleration | G | 0.3 | 0.3 | 0.6 | |||
| Ball Screw | Basic Dynamic Load rating Ca | N | 8042 | 6300 | 4152 | ||
| Basic Static Load rating Coa | N | 15088 | 11596 | 7439 | |||
| Linear Guide | Dynamic horizontal | (100km) | 18620 | ||||
| Static horizontal | N | 34320 | |||||
| Fixed Bearing | Basic Dynamic Load rating | N | 8447 | ||||
| Static Load Rating Cr | N | 5060 | |||||
| Parts | AC Servo Moter Output | W | 400 | ||||
| Ball Screw Ø | mm | Ø16 | |||||
| Coupling | mm | 10×14 | |||||
| Home Sensor | Outside | T64N2(NPN) | |||||
| Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
|---|---|---|---|---|---|---|
| Mitsubishi | M | No Brake (Horizontal Type) |
400 | 220 | HG-KR43 | MR-J4-40A |
| With Brake (Vertical type) |
400 | 220 | HG-KR43B | MR-J4-40A | ||
| Panasonic | P | No Brake (Horizontal Type) |
400 | 220 | MHMD042G1U | MbDHT2510 |
| With Brake (Vertical type) |
400 | 220 | MHMD042G1V | MBDHT2510 | ||
| Delta | T | No Brake (Horizontal Type) |
400 | 220 | ECMA-C20604ES | ASD-B20421-B |
| With Brake (Vertical type) |
400 | 220 | ECMA-C20604FS | ASD-B20421-B |
GCH12-400W series
GCH12-400W series specification
| Performance | Ballscrew Accuracy Grade code | L | C | ||||
|---|---|---|---|---|---|---|---|
| Ballscrew Accuracy Grade | C7 | C5 | |||||
| Repeatability | mm | ± 0.005 | ± 0.003 | ||||
| Stroke | mm | 50-1250mm/50 intervals(50 Increments) | 50-900mm/50 intervals(50 Increments) | ||||
| Lead | mm | 5 | 10 | 20 | 32 | ||
| Maximum Rotating Speed | RPM | 3600 | 3600 | 3600 | 3600 | ||
| Maximum Linear Speed | mm/s | 300 | 600 | 1200 | 1920 | ||
| Maximum Payload | Horizontal | kg | 110 | 88 | 40 | 30 | |
| Vertical | kg | 33 | 22 | 10 | 8 | ||
| Rated Thrust | N | 1388 | 694 | 347 | 218 | ||
| Maximum acceleration | G | 0.3 | 0.3 | 0.6 | 0.6 | ||
| Ball Screw | Basic Dynamic Load rating Ca | N | 11570 | 6300 | 4152 | 7326 | |
| Basic Static Load rating Coa | N | 23030 | 11596 | 7439 | 14157 | ||
| Linear Guide | Dynamic horizontal | (100km) | 51128 | ||||
| Static horizontal | N | 84518 | |||||
| Fixed Bearing | Basic Dynamic Load rating | N | 8447 | ||||
| Static Load Rating Cr | N | 5060 | |||||
| Parts | AC Servo Moter Output | W | 400 | ||||
| Ball Screw Ø | mm | Ø16 | |||||
| Coupling | mm | 10×14 | |||||
| Home Sensor | Outside | T64N2(NPN) | |||||
| Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
|---|---|---|---|---|---|---|
| Mitsubishi | M | No Brake (Horizontal Type) |
400 | 220 | HG-KR43 | MR-J4-40A |
| With Brake (Vertical type) |
400 | 220 | HG-KR43B | MR-J4-40A | ||
| Panasonic | P | No Brake (Horizontal Type) |
400 | 220 | MSMD042G1U | MBDHT2510 |
| With Brake (Vertical type) |
400 | 220 | MSMD042G1V | MADHT2510 | ||
| Delta | T | No Brake (Horizontal Type) |
400 | 220 | ECMA-C20604ES | ASD-B20421-B |
| With Brake (Vertical type) |
400 | 220 | ECMA-C20604FS | ASD-B20421-B |
GCH5S series
GCH5S series specification
| Specification | |||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Repeatability | mm | ± 0.005 | |||||||||||
| Ball Screw Lead | mm | 2 | |||||||||||
| Maximum Rotating Speed | RPM | 3000 | |||||||||||
| Maximum Linear Speed | (mm/s) | 100 | |||||||||||
| Maximum Payload | Horizontal | kg | 30 (Dual carriage) | ||||||||||
| Vertical | kg | 10 (Dual carriage) | |||||||||||
| Vertical with regenrative resistor | kg | 12 (Dual carriage) | |||||||||||
| Rated Thrust | N | 854 | |||||||||||
| Stroke pitch | mm | 25-400mm/25 intervals (25 Increments) | |||||||||||
| Maximum acceleration | G | 0.1 | |||||||||||
| Ball Screw | Basic Dynamic Load rating Ca | N | 2411 | ||||||||||
| Basic Static Load rating Coa | N | 5779 | |||||||||||
| Linear Guide | Dynamic horizontal | 100km | 5904 | ||||||||||
| Static horizontal | 16904 | ||||||||||||
| Fixed Bearing | Basic Dynamic Load rating | N | 5361 | ||||||||||
| Static Load Rating Cr(N) | N | 2880 | |||||||||||
| AC Servo Moter Output | W | 100 | |||||||||||
| Ball Screw ⌀ | mm | C7⌀12 | |||||||||||
| Coupling(mm) | 7X8 | ||||||||||||
| Home Sensor | Outside | T64N2(NPN+2m cable) | |||||||||||
| Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
|---|---|---|---|---|---|---|
| Mitsubishi | M | No Brake (Horizontal Type) |
400 | 220 | HG-KR43 | MR-J4-40A |
| With Brake (Vertical type) |
400 | 220 | HG-KR43B | MR-J4-40A | ||
| Panasonic | P | No Brake (Horizontal Type) |
400 | 220 | MSMD042G1U | MBDHT2510 |
| With Brake (Vertical type) |
400 | 220 | MSMD042G1V | MADHT2510 | ||
| Delta | T | No Brake (Horizontal Type) |
400 | 220 | ECMA-C20604ES | ASD-B20421-B |
| With Brake (Vertical type) |
400 | 220 | ECMA-C20604FS | ASD-B20421-B |
GCH8S series
GCH8S series specification
| Specification | |||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Repeatability | mm | ± 0.005 | |||||||||||||
| Ball Screw Lead | mm | 5 | |||||||||||||
| Maximum Rotating Speed | RPM | 3600 | |||||||||||||
| Maximum Linear Speed | (mm/s) | 300 | |||||||||||||
| Maximum Payload | Horizontal | kg | 100 (Dual carriage) | ||||||||||||
| Vertical | kg | 15 (Dual carriage) | |||||||||||||
| Vertical with regenrative resistor | kg | 30 (Dual carriage) | |||||||||||||
| Rated Thrust | N | 683 | |||||||||||||
| Stroke pitch | mm | 25-525mm/25 intervals (25 Increments) | |||||||||||||
| Maximum acceleration | G | 0.3 | |||||||||||||
| Ball Screw | Basic Dynamic Load rating Ca | N | 8042 | ||||||||||||
| Basic Static Load rating Coa | N | 15088 | |||||||||||||
| Linear Guide | Dynamic horizontal | 100km | 18620 | ||||||||||||
| Static horizontal | N | 34230 | |||||||||||||
| Fixed Bearing | Basic Dynamic Load rating | N | 8447 | ||||||||||||
| Static Load Rating Cr(N) | N | 5060 | |||||||||||||
| AC Servo Moter Output | W | 200 | |||||||||||||
| Ball Screw ⌀ | mm | C7⌀16 | |||||||||||||
| Coupling | mm | 10X14/11 | |||||||||||||
| Home Sensor | Outside | T64N2(NPN+2m cable) | |||||||||||||
| Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
|---|---|---|---|---|---|---|
| Mitsubishi | M | No Brake (Horizontal Type) |
400 | 220 | HG-KR43 | MR-J4-40A |
| With Brake (Vertical type) |
400 | 220 | HG-KR43B | MR-J4-40A | ||
| Panasonic | P | No Brake (Horizontal Type) |
400 | 220 | MSMD042G1U | MBDHT2510 |
| With Brake (Vertical type) |
400 | 220 | MSMD042G1V | MADHT2510 | ||
| Delta | T | No Brake (Horizontal Type) |
400 | 220 | ECMA-C20604ES | ASD-B20421-B |
| With Brake (Vertical type) |
400 | 220 | ECMA-C20604FS | ASD-B20421-B |
GCH8S-400W series
GCH8S-400W series specification
| Specification | |||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Repeatability | mm | ± 0.005 | |||||||||||||
| Ball Screw Lead | mm | 5 | |||||||||||||
| Maximum Rotating Speed | RPM | 3600 | |||||||||||||
| Maximum Linear Speed | (mm/s) | 300 | |||||||||||||
| Maximum Payload | Horizontal | kg | 110 (Dual carriage) | ||||||||||||
| Vertical | kg | 33 (Dual carriage) | |||||||||||||
| Vertical with regenrative resistor | kg | 33 (Dual carriage) | |||||||||||||
| Rated Thrust | N | 1388 | |||||||||||||
| Stroke pitch | mm | 25-525mm/25 intervals (25 Increments) | |||||||||||||
| Maximum acceleration | G | 0.3 | |||||||||||||
| Ball Screw | Basic Dynamic Load rating Ca | N | 8042 | ||||||||||||
| Basic Static Load rating Coa | N | 15088 | |||||||||||||
| Linear Guide | Dynamic horizontal | 100km | 18620 | ||||||||||||
| Static horizontal | N | 34230 | |||||||||||||
| Fixed Bearing | Basic Dynamic Load rating | N | 8447 | ||||||||||||
| Static Load Rating Cr(N) | N | 5060 | |||||||||||||
| AC Servo Moter Output | W | 400 | |||||||||||||
| Ball Screw ⌀ | mm | C7⌀16 | |||||||||||||
| Coupling | mm | 10X14 | |||||||||||||
| Home Sensor | Outside | T64N2(NPN+2m cable) | |||||||||||||
| Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
|---|---|---|---|---|---|---|
| Mitsubishi | M | No Brake (Horizontal Type) |
400 | 220 | HG-KR43 | MR-J4-40A |
| With Brake (Vertical type) |
400 | 220 | HG-KR43B | MR-J4-40A | ||
| Panasonic | P | No Brake (Horizontal Type) |
400 | 220 | MSMD042G1U | MBDHT2510 |
| With Brake (Vertical type) |
400 | 220 | MSMD042G1V | MADHT2510 | ||
| Delta | T | No Brake (Horizontal Type) |
400 | 220 | ECMA-C20604ES | ASD-B20421-B |
| With Brake (Vertical type) |
400 | 220 | ECMA-C20604FS | ASD-B20421-B |